Method for measuring a trench depth parameter of a material

Details Method for measuring a trench depth parameter of a material Method for measuring a trench depth parameter of a material

1993-09-22

1995-02-21

Redding, David A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356357, 356378, 356382, G01B 902

Patent

active

053921186

ABSTRACT:
A method suitable for measuring a trench depth parameter of a material. The method comprises the steps of propagating source radiation around a trench and through the material; and analyzing a characteristic variation of an interference signal as a determinant of the trench depth parameter; the interference signal developing as radiation from a base of the trench interferes with radiation propagated from a top surface of the material.

REFERENCES:
patent: 4615620 (1986-10-01), Noguchi et al.
patent: 4744660 (1988-05-01), Noguchi et al.

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