Edge wheel dry manifold

Details Edge wheel dry manifold Edge wheel dry manifold

2008-04-01

2008-04-01

Rinehart, Kenneth (Department: 3749)

Drying and gas or vapor contact with solids

Apparatus

Vacuum

C134S021000, C134S095200

Reexamination Certificate

active

10745219

ABSTRACT:
A apparatus for drying a substrate includes a vacuum manifold positioned adjacent to an edge wheel. The edge wheel includes an edge wheel groove for receiving a peripheral edge of a substrate, and the edge wheel is capable of rotating the substrate at a desired set velocity. The vacuum manifold includes a proximity end having one or more vacuum ports defined therein. The proximity end is positioned at least partially within the edge wheel groove, and using supplied vacuum removes fluids that accumulate in the edge wheel groove and prevents re-deposit of trapped fluids around the peripheral edge of the substrate.

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