Delivery of solid chemical precursors

Details Delivery of solid chemical precursors Delivery of solid chemical precursors

2006-03-10

2008-09-23

Hoang, Tu (Department: 3742)

Electric resistance heating devices

Heating devices

Vaporizer

C392S398000

Reexamination Certificate

active

07428373

ABSTRACT:
Systems and methods are provided for delivering solid precursors. In certain embodiments of the present application, a flow monitor, pressure sensor, or temperature sensor is used to measure and regulate the flow of vaporized solid precursor material from a vaporization chamber to a deposition chamber. To avoid condensation of the solid precursor material in the delivery lines, a controller is placed in a feed back loop to make adjustments to the amount of vapor available. Additional embodiments are disclosed and claimed.

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