Apparatus and method for edge cleaning

Details Apparatus and method for edge cleaning Apparatus and method for edge cleaning

1988-04-25

1989-06-13

Coe, Philip R.

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

134157, 134198, B08B 304

Patent

active

048382892

ABSTRACT:
Apparatus and method for cleaning material at the outer edge of an object by applying a solvent for the material to a flat surface adjacent the edge and moving the solvent onto the edge by centrifugal force.

REFERENCES:
patent: 3736115 (1973-05-01), Blum
patent: 4027686 (1977-06-01), Shortes et al.
patent: 4027686 (1977-06-01), Shortes et al.
patent: 4113492 (1978-09-01), Sato et al.
patent: 4161356 (1979-07-01), Giffin et al.
patent: 4489740 (1984-12-01), Rattan et al.
patent: 4544446 (1985-10-01), Cady
patent: 4564280 (1986-01-01), Fukuda
"Chemical Engineers Handbook" Fourth Edition, John H. Perry, McGraw-Hill, 1963, pp. 3-222 Through 3-224.
Perry (ed.), Chemical Engineers' Handbook, Fourth Edition, Chapter 3, pp. 222-224.
IBM Technical Disclosure Bulletin, "Wafer Back Side Periphery for Simultaneous Processing", vol. 18, No. 6 (Nov. 1975), p. 1769.
IBM Technical Disclosure Bulletin, "Elimination of Photoresist Bead from Substrate Periphery", vol. 13, No. 9 (Feb. 1971), p. 2693.
IBM Technical Disclosure Bulletin, "Remover for Peripheral Resist Build-ups", vol. 19, No. 6 (Nov. 1976), pp. 2114-2115.

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