Anti-reflective coatings and dual damascene fill...

Details Anti-reflective coatings and dual damascene fill... Anti-reflective coatings and dual damascene fill...

2005-05-17

2005-05-17

Choi, Ling-Siu (Department: 1713)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

At least one aryl ring which is part of a fused or bridged...

C524S376000, C524S379000, C524S365000, C524S315000, C524S502000, C430S270100, C430S286100, C430S950000, C430S935000

Reexamination Certificate

active

06894104

ABSTRACT:
New anti-reflective or fill compositions having improved flow properties are provided. The compositions comprise a styrene-allyl alcohol polymer and preferably at least one other polymer (e.g., cellulosic polymers) in addition to the styrene-allyl alcohol polymer. The inventive compositions can be used to protect contact or via holes from degradation during subsequent etching in the dual damascene process. The inventive compositions can also be applied to substrates (e.g., silicon wafers) to form anti-reflective coating layers having high etch rates which minimize or prevent reflection during subsequent photoresist exposure and developing.

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Arco Chemical launches alcohol derivatives worldwide. Chem. Mark. Rep., vol. 245. No. 16, Apr. 18, 1994, pp. 21, Journal, col,. ISSN 00900907, English0.

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