4. Semiconductor device manufacturing: process
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Apparatus and method for manufacturing thin film electrode...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Apparatus and method for measuring a property of a layer in...

Semiconductor device manufacturing: process – Including control responsive to sensed condition
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Apparatus and method for measuring wafer clamping tension

Semiconductor device manufacturing: process – With measuring or testing
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Apparatus and method for metal plasma vapor deposition and...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Apparatus and method for miniature semiconductor packages

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Including adhesive bonding step
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Apparatus and method for minimizing diffusion in stacked...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Apparatus and method for nanoscale pattern generation

Semiconductor device manufacturing: process – Masking
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Apparatus and method for non-contact assessment of a...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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APPARATUS AND METHOD FOR OPTICAL EVALUATION, APPARATUS AND...

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
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APPARATUS AND METHOD FOR OPTICAL EVALUATION, APPARATUS AND...

Semiconductor device manufacturing: process – With measuring or testing
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Apparatus and method for optical interference fringe based...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Apparatus and method for oxidizing silicon substrates

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Apparatus and method for packaging semiconductor devices...

Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of... – Including passive device
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Apparatus and method for planarization of spin-on materials

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Utilizing reflow
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Apparatus and method for planarizing the surface of a...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Apparatus and method for plasma etching

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Apparatus and method for plasma processing high-speed...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Apparatus and method for plasma treatment

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Apparatus and method for polishing a semiconductor wafer in an o

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Apparatus and method for polishing a semiconductor wafer in...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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