4. Semiconductor device manufacturing: process
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Apparatus and method for forming an oxynitride insulating...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Apparatus and method for forming an oxynitride insulating...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Apparatus and method for forming aperture of vertical cavity...

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal
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Apparatus and method for forming controlled deep trench top isol

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Apparatus and method for forming deposited film

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
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Apparatus and method for forming low dielectric constant film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Apparatus and method for forming polycrystalline silicon...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Apparatus and method for forming single crystalline nitride...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Polycrystalline semiconductor
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Apparatus and method for forming thin film at low...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Apparatus and method for forming vias

Semiconductor device manufacturing: process – Having organic semiconductive component
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Apparatus and method for growth of a thin film

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Apparatus and method for heat treating thin film

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Apparatus and method for heat-treating semiconductor substrate

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Apparatus and method for high density CMOS gate arrays

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Apparatus and method for hydrogenating polysilicon thin film tra

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of... – Ionized irradiation
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Apparatus and method for identifying proper orientation and...

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor
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Apparatus and method for improving AC coupling on circuit...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Apparatus and method for improving ball joints in...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Apparatus and method for improving uniformity in batch processin

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Apparatus and method for in-situ removal of polymer residue

Semiconductor device manufacturing: process – Cleaning of wafer as interim step
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