Shallow trench isolation using non-conformal dielectric and...
Shallow trench isolation using TEOS cap and polysilicon...
Shallow trench isolation using UV/O3 passivation prior to...
Shallow trench isolation with oxide-nitride/oxynitride liner
Shallow trench isolation with self aligned PSG layer
Shallow trench isolator via non-critical chemical mechanical...
Shot averaging for fine pattern alignment with minimal...
SiC patterning of porous silicon
Sidewall process for forming a low resistance source line
Silicon buffered shallow trench isolation
Silicon carbide and related wide-bandgap transistors on...
Silicon carbide schottky barrier diode and method of making
Silicon corner rounding by ion implantation for shallow...
Silicon corner rounding in shallow trench isolation process
Silicon nitride capped shallow trench isolation method for...
Silicon nitride capped shallow trench isolation method for...
Silicon nitride hardstop encapsulation layer for STI region
Silicon nitride-free isolation methods for integrated circuits
Silicon on insulator device and layout method of the same
Silicon on insulator DRAM process utilizing both fully and...