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Shallow trench isolation using non-conformal dielectric and...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Shallow trench isolation using TEOS cap and polysilicon...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Shallow trench isolation using UV/O3 passivation prior to...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Shallow trench isolation with oxide-nitride/oxynitride liner

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Shallow trench isolation with self aligned PSG layer

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – And gettering of substrate
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Shallow trench isolator via non-critical chemical mechanical...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Shot averaging for fine pattern alignment with minimal...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having substrate registration feature
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SiC patterning of porous silicon

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Sidewall process for forming a low resistance source line

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Recessed oxide by localized oxidation
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Silicon buffered shallow trench isolation

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Silicon carbide and related wide-bandgap transistors on...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having semi-insulating component
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Silicon carbide schottky barrier diode and method of making

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Implanting to form insulator
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Silicon corner rounding by ion implantation for shallow...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Recessed oxide by localized oxidation
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Silicon corner rounding in shallow trench isolation process

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Silicon nitride capped shallow trench isolation method for...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Silicon nitride capped shallow trench isolation method for...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Silicon nitride hardstop encapsulation layer for STI region

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Silicon nitride-free isolation methods for integrated circuits

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having substrate registration feature
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Silicon on insulator device and layout method of the same

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having semi-insulating component
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Silicon on insulator DRAM process utilizing both fully and...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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