Process for chemical vapor deposition of tungsten onto a...
Process for chemical vapor desposition of a nitrogen-doped...
Process for CMP removal of excess trench or via filler metal...
Process for conductors with selective deposition
Process for controlling the height of a stud intersecting an int
Process for creating vias using pillar technology
Process for defining the width of silicon gates using spacers as
Process for depositing high deposition rate halogen-doped silico
Process for depositing metal contacts on a buried grid solar...
Process for depositing thin films containing titanium and...
Process for depositing WSix layers on a high topography with...
Process for deuterium passivation and hot carrier immunity
Process for device fabrication in which a thin layer of cobalt s
Process for fabricating a device using nitrogen implantation int
Process for fabricating a floating gate of a flash memory in...
Process for fabricating a metal wiring and metal contact in...
Process for fabricating a metallization structure
Process for fabricating a metallized interconnect
Process for fabricating a metallized interconnect structure in a
Process for fabricating a multilevel interconnect