Liquid phase deposition method for forming silicon dioxide film
Liquid precursors for the CVD deposition of amorphous carbon...
Load lock chamber having two dual slot regions
Lossless co-planar wave guide in CMOS process
Low dielectric constant film and method thereof
LOW DIELECTRIC CONSTANT FILM COMPOSED OF BORON, NITROGEN,...
Low dielectric constant films derived by sol-gel processing...
Low dielectric constant insulating films with laminated...
Low dielectric constant material and method of processing by...
Low dielectric constant material for integrated circuit...
Low dielectric constant material, insulating film comprising...
Low dielectric constant plasma polymerized thin film and...
Low dielectric constant polymers having good adhesion and...
Low dielectric constant polyorganosilicon coatings generated...
Low dielectric constant polyorganosilicon coatings generated...
Low dielectric constant porous films
Low dielectric foam dielectric formed from polymer...
Low K and ultra low K SiCOH dielectric films and methods to...
Low k dielectric CVD film formation process with in-situ...
Low k dielectric materials with inherent copper ion...