Light source position adjusting device and method

Light source unit and wavelength stabilizing control method,...

Light source unit assembly for photographic enlarger

Light source, light source generation control method,...

Light valve imaging apparatus having improved optical configurat

Light-mixing compartment for a light projector

Light-modifying apparatus for exposure devices

Light-reflection type pattern forming system

Lighting optical device, exposure system, and exposure method

Lighting system for use in a photographic enlarger

Limiting a portion of a patterning device used to pattern a...

Line-scanning optical printer

Linear light source for a film scanner

Lithographic apparatus

Lithographic apparatus

Lithographic apparatus

Lithographic apparatus

Lithographic apparatus

Lithographic apparatus and a measurement system

Lithographic apparatus and device manufacturing method