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Projection objective for lithography

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Projection objective for lithography

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Projection objective for microlithography

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Projection objective for microlithography

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Projection objective having a high aperture and a planar end...

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Projection objective having adjacently mounted aspheric lens...

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Projection objective of a microlithographic exposure apparatus

Optical: systems and elements – Lens – Fluid
Reexamination Certificate

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Projection objective of a microlithographic projection...

Optical: systems and elements – Lens – With variable magnification
Reexamination Certificate

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Projection objective of a microlithographic projection...

Optical: systems and elements – Lens – Fluid
Reexamination Certificate

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Projection objective of a microlithographic projection...

Optical: systems and elements – Lens – Fluid
Reexamination Certificate

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Projection objective with fixed focal length formed of...

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Projection objective, especially for microlithography, and...

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Projection objective, especially for microlithography, and...

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Projection objectives including a plurality of mirrors with...

Optical: systems and elements – Lens – With reflecting element
Reexamination Certificate

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Projection objectives including a plurality of mirrors with...

Optical: systems and elements – Lens – With reflecting element
Reexamination Certificate

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Projection optical apparatus

Optical: systems and elements – Holographic system or element – Using a hologram as an optical element
Reexamination Certificate

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Projection optical apparatus

Optical: systems and elements – Lens – Asymmetric
Reexamination Certificate

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Projection optical system

Optical: systems and elements – Lens – With reflecting element
Reexamination Certificate

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Projection optical system

Optical: systems and elements – Lens – Reverse telephoto
Reexamination Certificate

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Projection optical system

Optical: systems and elements – Lens – Multiple component lenses
Patent

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