Electrostatic holding apparatus having insulating layer with...
Electrostatic holding device and electrostatic tweezers...
Electrostatic positioner
Electrostatic relay
Electrostatic relay
Electrostatic sensing chuck using area matched electrodes
Electrostatic sensing chuck using area matched electrodes
Electrostatic support assembly having an integral ion focus ring
Electrostatic wafer chuck, and charged-particle-beam...
Electrostatic wafer chucks and charged-particle-beam...
Electrostatic wafer clamp
Electrostatic wafer clamp
Electrostatic wafer clamp
Electrostatic wafer clamp having electrostatic seal for...
Electrostatic wafer clamp having low particulate contamination o
Electrostatically attracting electrode and a method of manufactu
Electrostatically attracting electrode and a method of...
Electrostatically screened, voltage-controlled electrostatic...
Energy transfer apparatus
Equipment for holding a semiconductor wafer, a method for...