Megasonic processing apparatus with frequency sweeping of...
Megasonic transducer for cleaning substrate surfaces
Megasonic transducer with focused energy resonator
Membrane position control
Membrane tension control
Memory repeater
MEMS actuator with lower power consumption and lower cost...
MEMS device having a flexure with integral electrostatic...
MEMS device having distance stops
MEMS device with two axes comb drive actuators
MEMS electrostatic actuators with reduced actuation voltage
MEMS micro-translation device with improved linear travel...
MEMS microactuators located in interior regions of frames...
MEMS scanner with dual magnetic and capacitive drive
MEMS structure having a stress inverter...
MEMS structure with metal protection rings
MEMS switch
MEMS vibrating structure using a single-crystal...
MEMS vibrating structure using a single-crystal...
Meso-to-micro-scaleable device and methods for conversion of...