Microelectromechanics-based frequency signature sensor
Microelectromechnical system for tilting a platform
Microelectromechnical system for tilting a platform
Microelectronic structures including semiconductor islands
Microelement piezoelectric feedback type picking and...
Microfabricated acoustic source and receiver
Microfabricated microengine for use as a mechanical drive and po
Microfabricated rotary motion wobble motor and disk drive incorp
Microfabricated torsional drive utilizing lateral...
Microfabricated transducers formed over other circuit...
Microfabricated vertical comb actuator using plastic...
Microfabricated vertical comb actuator using plastic...
Micromachine
Micromachine and method of fabricating the same
Micromachined capacitive electrical component
Micromachined chemical jet dispenser
Micromachined imaging transducer
Micromachined moving device controlled by a...
Micromachined piezoelectric transducer
Micromachined piezoelectric ultrasound transducer arrays