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Micro-machined resonator

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent

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Micro-mirror device with increased mirror tilt

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Micro-mirror with rotor structure

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Micro-oscillation element having two rotational axes that...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Micro-oscillation element incorporating springs

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Micro-positioned flatbed

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent

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Micro-positioning device

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate

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Micro-relay and method for manufacturing the same

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
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Micro-shell transducer

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate

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Micro-traveller with ultrasonic motor

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent

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Microactuator

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Microactuator

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Microactuator and method for fabricating the same

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate

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Microactuator and method of manufacturing the same

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Microactuator array with integrally formed package

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate

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Microactuator device with a countermeasure for particles on...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate

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Microactuator substrate

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate

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Microactuator with displacement sensing function and...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Microactuator with displacement sensing function and...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Microactuator with displacement sensing function and...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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