Micro-actuator utilizing electrostatic and Lorentz forces,...
Micro-actuator with interdigitated combs perpendicular to a...
Micro-beam friction liner and method of transferring energy
Micro-beam tactile sensor for the measurement of vertical positi
Micro-beam tactile sensor for the measurement of vertical positi
Micro-cantilever
Micro-coextruded film modified with piezoelectric layers
Micro-electrical-mechanical device and method of making same
Micro-electrical-mechanical system (MEMS) device having a...
Micro-electro mechanical system using snapping tabs, comb...
Micro-electro-mechanical-system (MEMS) mirror device having...
Micro-electromechanical device
Micro-electromechanical devices having variable capacitors...
Micro-electromechanical structure resonator frequency...
Micro-electromechanical structure resonator frequency...
Micro-electromechanical structure resonator, method of...
Micro-electromechanical structure resonator, method of...
Micro-electrostatic motor
Micro-fabricated device with integrated electrostatic actuator
Micro-fabricated devices having a suspended membrane or...