Solvent-less vapor deposition apparatus and process for applicat
Source gas delivery
Spray apparatus with self cleaning nozzle
Steel sheet coated with Zn-Mg binary coating layer excellent in
Stripping of diffusion treated metals
Structure and method for enhancing adhesion to a polyimide surfa
Substrate coating techniques, including fabricating materials on
Substrate having uniform tungsten silicide film and method of ma
Substrate processing apparatus and method
Substrate processing apparatus and substrate processing method
Substrate processing apparatus, method of manufacturing a...
Substrate processing method
Substrate processing method
Substrate processing method which utilizes a rotary member coupl
Substrate support including purge ring having inner edge...
Substrate support member with a purge gas channel and pumping sy
Substrate temperature control apparatus and technique for CVD re
Suppression of NiSi 2 formation in a nickel salicide...
Surface acoustic wave device and diamond base material for the s
Surface hardening of reprographic machine components by coating