4. Coating apparatus
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Purging gas control structure for CVD chamber

Coating apparatus – Gas or vapor deposition
Patent

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Purified silicon production system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Pyrogenic wet thermal oxidation of semiconductor wafers

Coating apparatus – Program – cyclic – or time control – Having prerecorded program medium
Patent

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Pyrolytic carbon coating apparatus having feed gas actuator

Coating apparatus – Gas or vapor deposition – Means to coat or impregnate particulate matter
Reexamination Certificate

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