Transfer arm apparatus and semiconductor processing system using

Transport device for substrates to be coated in a vacuum coating

Transporting device with roller systems for vacuum-coating insta

Turntable mechanism

Two-piece chuck

Unitary wafer plasma enhanced chemical vapor deposition holding

Vacuum apparatus for coating an optical substrate

Vacuum chuck for holding thin sheet material

Vacuum coating apparatus

Vacuum coating apparatus for overall coating of a substrate by r

Vacuum coating apparatus having a plurality of lock chambers

Vacuum coating apparatus with rotary-driven substrate carrier

Vacuum coating device for coating substrates on all sides

Vacuum evaporation system for the deposition of a thin evaporate

Vacuum processing apparatus

Vacuum processing apparatus

Vacuum processing apparatus

Vacuum processing apparatus and transportation system thereof

Vacuum processing method

Vacuum sealing mechanism for a semiconductor device manufacturin