Magnetic thin film, and method of manufacturing the same, and ma

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428216, 428457, 428693, 428698, 428900, 428692, 148300, 148306, B32B 1500

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058494006

ABSTRACT:
A magnetic thin film having excellent soft magnetic properties formed by alternately laminating a main magnetic layer and an intermediate layer, in which the main magnetic layer includes magnetic crystal grains substantially having a columnar structure which have an average height dl and an average diameter ds forming a shape ratio of 0.3.ltoreq.ds/dl.ltoreq.90.9, and the intermediate layer has saturation magnetic flux density of at least 0.1 tesla less than the main magnetic layer. The main magnetic layer and the intermediate layer having saturation magnetic flux density of at least 0.1 tesla less than the main magnetic layer are alternately laminated. It is preferable that the main magnetic layer has a thickness of 3 to 100 nm, and the intermediate layer has a thickness of 0.1 to 10 nm. In addition, it is preferable that a thickness of the entire laminated structure is in the range of about 100 nm to 10 .mu.m. The main magnetic layer is formed mainly of magnetic crystal grains, and there are some grains which grow penetrating the intermediate layer.

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