Josephson junction

Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Producing josephson junction – per se


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505410, 505413, 505702, 505728, 216 41, 216 3, H01L 2100




A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material.

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