Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
250307, 365151, H01J 37305
A process for etching with an atomic force microscope using a two-dimensional metal chalcogenide as the substrate, is disclosed.
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Delawski Edward J.
Parkinson Bruce A.
Berman Jack I.
E. I. Du Pont de Nemours and Company
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