Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
118719, 118723, 118728, 118729, 118730, 118726, C23C 1426, C23C 1456
Apparatus is described which is especially well suited for simultaneous molecular beam epitaxy of materials, such as silicon, on a plurality of substrates.
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American Telephone and Telegraph Company AT&T Bell Laboratories
Businger Peter A.
Laumann Richard D.
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