Apparatus for producing superconducting oxide film

Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k


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505730, 505734, 118715, 118725, 118688, 118689, 118690, 118708, 118712, 427 8, C23C 1600




An apparatus for producing a superconducting oxide film with stable properties by metal organic chemical vapor deposition, suitable for mass production, is provided with a gas analyzer comprising a differential pressure meter 38 between a raw material gas collector tube 35 provided in a transfer line 8 for leading a raw material gas to a film forming chamber 10 and a bypass line 37, a dilution gas line 49 interlocked with the differential pressure meter 38 and for leading a dilution gas to the raw material gas collector tube 35, a gas separation column 42 branched from the bypass line, a gas detector 31 connected to the gas separation column 42, flow rate controllers 50 for carrier gases 43 and 45 and a thermostat 13 for heating all the lines. Amounts of raw materials gases can be readily measured and controlled and thus superconducting oxide films of stable properties in a constant metal composition ratio can be continuously produced, and thus the present apparatus is suitable for mass production of tape form, superconducting materials.

patent: 5116811 (1992-05-01), Abe
Japanese J. Appl. Phys., vol. 29 (1990), L1072.
Japanese J. Appl. Phys., vol. 29 (1990), 1932.


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